The Wafer Dispense Bay demo
A working wet-process cell monitored end to end: the original and thermal streams side by side, OSD overlays with each nozzle's name, coordinates, and temperature, a status log that records every in-position and off-position event, and a process temperature chart with alarm line for the active nozzle, wafer center, and wafer edge.
The demo is a joint build: DCI handles the in-tool integration, with cameras and lighting mounted at the chamber viewport and chemical-resistant sealing, deployable on its self-developed tools or retrofitted to existing platforms; Atomrock provides the vision AI and edge computing, from nozzle recognition, tracking, and thermal analytics to the edge AI hardware and AtomOS that turn alarm signals into closed-loop integration with the tool.
Bring your process questions. The DCI and Atomrock team will be on site all three days for one-on-one discussions.
Wet processing is where yield is won
Dispense temperature, nozzle position, and timing decide the outcome of every wet-process step, yet most of it happens out of sight. DCI's process expertise combined with Atomrock's vision AI makes the step observable while it runs: no process contact, no added cycle time, evidence for every wafer.
Perception Vigilance
Multi-modal thermal imaging reads the dispense jet, the wafer surface, and the chamber, surfacing what the human eye and conventional cameras miss.
Precision Inspection
Vision AI recognizes each nozzle, tracks live X, Y coordinates, detects in-position and off-position events, and logs every dispense step as data.
Real-time response
Live temperature trends with alarm thresholds on Atomrock edge AI hardware running AtomOS, ready for closed-loop integration with the tool.
Booth Q5537, TaiNEX 2, 1F
We recommend entering TaiNEX 2 at the Q entrance on the 1st floor.
Booth Q5537 sits inside the Smart Manufacturing Pavilion.
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